Patent Assignment
Reel/Frame 023114/0951
Assignment of Assignor's Interest
Recorded: 2009-08-19
Pages: 2
Assignors
MARAKHTANOV, ALEXEI
Executed: 2008-09-29
HUDSON, ERIC
Executed: 2008-09-30
DHINDSA, RAJINDER
Executed: 2008-09-29
BENJAMIN, NEIL
Executed: 2008-09-30
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Apparatus for a Hybrid Capacitively-Coupled and an Inductively-Coupled Plasma Processing System