Patent Assignment
Reel/Frame 023121/0595
Assignment of Assignor's Interest
Recorded: 2009-08-20
Pages: 7
Assignors
KOO, BONWOONG
Executed: 2009-08-12
CAMPBELL, CHRISTOPHER R.
Executed: 2009-08-11
CHANEY, CRAIG R.
Executed: 2009-08-06
LINDBERG, ROBERT
Executed: 2009-08-11
PEREL, ALEXANDER S.
Executed: 2009-08-20
PLATOW, WILHELM P.
Executed: 2009-08-11
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Ion Source and a Method for in-Situ Cleaning Thereof