Patent Assignment
Reel/Frame 023131/0976
Assignment of Assignor's Interest
Recorded: 2009-08-21
Pages: 6
Assignors
CHEN, KUAN-YU
Executed: 2009-08-14
LIN, HSIEN-HSIN
Executed: 2009-08-14
NIEH, CHUN-FENG
Executed: 2009-08-19
SUNG, HSUEH-CHANG
Executed: 2009-08-18
SU, CHIEN-CHANG
Executed: 2009-08-14
KWOK, TSZ-MEI
Executed: 2009-08-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Improving Selectivity of Epi Process