Patent Assignment
Reel/Frame 023141/0722
Assignment of Assignor's Interest
Recorded: 2009-08-25
Pages: 3
Assignor
WARDENIER, PETER HANZEN
Executed: 2009-07-28
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Correction Method for Non-Uniform Reticle Heating in a Lithographic Apparatus