Patent Assignment
Reel/Frame 023161/0612
Assignment of Assignor's Interest
Recorded: 2009-08-28
Pages: 6
Assignors
MANN, HANS-JUERGEN
Executed: 2004-10-10
SINGER, WOLFGANG
Executed: 2004-10-21
SCHULTZ, JOERG
Executed: 2004-10-14
WANGLER, JOHANNES
Executed: 2004-11-18
SCHUSTER, KARL-HEINZ
Executed: 2004-10-07
DINGER, UDO
Executed: 2004-10-07
ANTONI, MARTIN
Executed: 2004-11-18
ULRICH, WILHELM
Executed: 2004-10-12
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System Particularly for Microlithography
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.