Patent Assignment
Reel/Frame 023188/0570
Assignment of Assignor's Interest
Recorded: 2009-09-04
Pages: 4
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device, and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.