Patent Assignment
Reel/Frame 023200/0214
Assignment of Assignor's Interest
Recorded: 2009-09-08
Pages: 2
Assignor
FIOLKA, DAMIAN
Executed: 2009-08-28
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination Optics for a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.