Patent Assignment
Reel/Frame 023226/0252
Assignment of Assignor's Interest
Recorded: 2009-09-14
Pages: 5
Assignors
DIECKMANN, NILS
Executed: 2009-08-13
MAUL, MANFRED
Executed: 2009-08-14
HETTICH, CHRISTIAN
Executed: 2009-08-14
NATT, OLIVER
Executed: 2009-08-25
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.