Assignment of Assignor's Interest

Recorded: 2009-09-14 Pages: 5

Assignors

TOTZECK, MICHAEL

Executed: 2009-09-02

GRUNER, TORALF

Executed: 2009-07-28

FIOLKA, DAMIAN

Executed: 2009-07-29

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Optical System of a Microlithographic Projection Exposure Apparatus

Patent: 8,237,918 →

Application: 12/498,475 →

Publication: US 2009/0323042

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.