Assignment of Assignor's Interest

Recorded: 2009-09-15 Pages: 5

Assignors

OSSMANN, JENS

Executed: 2009-08-04

ENDRES, MARTIN

Executed: 2009-08-06

STUETZLE, RALF

Executed: 2009-08-07

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Catoptric Illumination System for Microlithography Tool

Patent: 8,253,925 →

Application: 12/533,513 →

Publication: US 2009/0323044

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.