Patent Assignment
Reel/Frame 023232/0432
Assignment of Assignor's Interest
Recorded: 2009-09-15
Pages: 5
Assignors
FIOLKA, DAMIAN
Executed: 2009-07-29
MAUL, MANFRED
Executed: 2009-08-03
SCHWAB, MARKUS
Executed: 2009-08-10
SEITZ, WOLFGANG
Executed: 2009-07-31
DITTMANN, OLAF
Executed: 2009-09-07
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Illumination System of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.