Correction on Reel Frame No. 023102/0055 to Correct Incorrect Appl. No. 12/277,141.

Recorded: 2009-09-14 Pages: 5

Assignor

KAWARAGI, HIROSHI

Executed: 2008-10-23

Assignee

TOKYO ELECTRON LIMITED

3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN

Covered Property (1)

Imaging Position Correction Method, Imaging Method, and Substrate Imaging Apparatus

Patent: 8,654,190 →

Application: 12/227,141 →

Publication: US 2009/0268021

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.