Patent Assignment
Reel/Frame 023257/0225
Assignment of Assignor's Interest
Recorded: 2009-09-21
Pages: 4
Assignor
KONDOH, KEISUKE
Executed: 2009-09-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
A Substrate Processing Apparatus