Assignment of Assignor's Interest

Recorded: 2009-09-22 Pages: 9

Assignors

WARM, BERNDT

Executed: 2009-08-22

RENNON, SIEGFRIED

Executed: 2009-08-19

DENGEL, GUENTHER

Executed: 2009-08-24

BAIER, JUERGEN

Executed: 2009-08-19

DINGER, UDO

Executed: 2009-09-07

BURKART, STEFAN

Executed: 2009-08-13

KOUROUKLIS, CHRISTOS

Executed: 2009-08-25

CHUNG, HIN YIU

Executed: 2009-09-16

WIESNER, STEFAN

Executed: 2009-09-10

ENKISCH, HARTMUT

Executed: 2009-08-31

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Method for Producing Facet Mirrors and Projection Exposure Apparatus

Application: 12/504,844 →

Publication: US 2010/0007866

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.