Patent Assignment
Reel/Frame 023262/0806
Assignment of Assignor's Interest
Recorded: 2009-09-22
Pages: 8
Assignors
XALTER, STEFAN
Executed: 2009-08-10
KWAN, YIM-BUN PATRICK
Executed: 2009-08-07
MAJOR, ANDRAS G.
Executed: 2009-08-07
MAUL, MANFRED
Executed: 2009-08-18
EISENMENGER, JOHANNES
Executed: 2009-08-07
FIOLKA, DAMIAN
Executed: 2009-08-13
HORN, JAN
Executed: 2009-08-16
DEGUENTHER, MARKUS
Executed: 2009-09-15
BACH, FLORIAN
Executed: 2009-08-07
PATRA, MICHAEL
Executed: 2009-08-17
WANGLER, JOHANNES
Executed: 2009-08-07
LAYH, MICHAEL
Executed: 2009-08-19
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Device for Monitoring Multiple Mirror Arrays in an Illumination System of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.