Assignment of Assignor's Interest

Recorded: 2009-09-22 Pages: 4

Assignors

DEGUENTHER, MARKUS

Executed: 2009-09-15

GRAEUPNER, PAUL

Executed: 2009-09-11

FISCHER, JUERGEN

Executed: 2009-08-25

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Illumination System for Illuminating a Mask in a Microlithographic Exposure Apparatus

Patent: 8,416,390 →

Application: 12/533,756 →

Publication: US 2010/0060873

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.