Patent Assignment
Reel/Frame 023272/0025
Assignment of Assignor's Interest
Recorded: 2009-09-23
Pages: 2
Assignee
SHIBAURA MECHATRONICS CORPORATION
2-5-1, KASAMA, SAKAE-KU,, YOKOHAMA-SHI, KANAGAWA, 247-8610, JAPAN
Covered Property
(1)
Apparatus and Method for Inspecting Edge of Semiconductor Wafer