Patent Assignment
Reel/Frame 023275/0419
Assignment of Assignor's Interest
Recorded: 2009-09-24
Pages: 3
Assignors
KOMETANI, YASUYUKI
Executed: 2009-09-03
HIRAO, TAKESHI
Executed: 2009-09-04
YAMAMURA, KENTARO
Executed: 2009-09-04
MIYAMOTO, KENICHI
Executed: 2009-09-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Cleaning and Drying-Preventing Method, and Cleaning and Drying-Preventing Apparatus