Patent Assignment
Reel/Frame 023279/0568
Assignment of Assignor's Interest
Recorded: 2009-09-24
Pages: 4
Assignors
FUKUDA, AKIRA
Executed: 2009-09-10
MOCHIZUKI, YOSHIHIRO
Executed: 2009-09-10
WADA, YUTAKA
Executed: 2009-09-10
SHIOKAWA, YOICHI
Executed: 2009-09-10
HIYAMA, HIROKUNI
Executed: 2009-09-10
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU,, TOKYO, JAPAN
Covered Property
(1)
Dressing Method, Method of Determining Dressing Conditions, Program for Determining Dressing Conditions, and Polishing Apparatus