Patent Assignment
Reel/Frame 023285/0565
Assignment of Assignor's Interest
Recorded: 2009-09-25
Pages: 2
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Semiconductor Device Manufacturing Method for Forming Film
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.