Patent Assignment
Reel/Frame 023297/0417
Assignment of Assignor's Interest
Recorded: 2009-09-29
Pages: 8
Assignors
OHMI, TADAHIRO
Executed: 2009-08-26
TOTO, TETSUYA
Executed: 2009-08-26
MATSUOKA, TAKAAKI
Executed: 2009-09-14
Assignees
NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
1-1, KATAHIRA 2-CHOME, AOBA-KU, SENDAI-SHI, MIYAGI, 980-8577, JAPAN
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Rotary Magnet Sputtering Apparatus