Patent Assignment
Reel/Frame 023306/0727
Assignment of Assignor's Interest
Recorded: 2009-09-30
Pages: 6
Assignors
SOER, WOUTER ANTHON
Executed: 2009-08-27
BANINE, VADIM YEVGENYEVICH
Executed: 2009-08-25
VAN HERPEN, MAARTEN MARINUS JOHANNES WILHELMUS
Executed: 2009-09-07
YAKUNIN, ANDREY MIKHAILOVICH
Executed: 2009-08-27
JAK, MARTIN JACOBUS JOHAN
Executed: 2009-08-12
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, NL-5504 DR VELDHOVEN, NETHERLANDS
Covered Property
(1)
Spectral Purity Filters for Use in a Lithographic Apparatus