Patent Assignment
Reel/Frame 023308/0057
Assignment of Assignor's Interest
Recorded: 2009-09-30
Pages: 4
Assignors
KABE, YOSHIRO
Executed: 2009-07-31
KOBAYASHI, TAKASHI
Executed: 2009-07-31
SHIOZAWA, TOSHIHIKO
Executed: 2009-07-31
KITAGAWA, JUNICHI
Executed: 2009-07-31
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Plasma Oxidation Processing Method, Plasma Processing Apparatus and Storage Medium