Patent Assignment
Reel/Frame 023317/0380
Assignment of Assignor's Interest
Recorded: 2009-10-02
Pages: 2
Assignors
MORITA, SHINYA
Executed: 2009-09-07
SADA, KOICHI
Executed: 2009-09-03
NAKADA, TAKAYUKI
Executed: 2009-09-03
MATSUDA, TOMOYUKI
Executed: 2009-09-07
Assignee
HITACHI KOKUSAI ELECTRIC, INC
14-1 SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.