Patent Assignment
Reel/Frame 023333/0478
Assignment of Assignor's Interest
Recorded: 2009-10-06
Pages: 6
Assignors
LIESENER, JAN
Executed: 2009-09-10
COLONNA DE LEGA, XAVIER
Executed: 2009-09-10
DE GROOT, PETER
Executed: 2009-09-29
Assignee
ZYGO CORPORATION
21 LAUREL BROOK ROAD P.O. BOX 448, MIDDLEFIELD, CONNECTICUT, 06455-0448
Covered Property
(1)
Interferometer for Determining Overlay Errors