Patent Assignment
Reel/Frame 023350/0325
Assignment of Assignor's Interest
Recorded: 2009-10-09
Pages: 3
Assignee
TEL EPION INC.
37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Method and System for Tilting a Substrate During Gas Cluster Ion Beam Processing
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.