Patent Assignment
Reel/Frame 023361/0640
Assignment of Assignor's Interest
Recorded: 2009-10-09
Pages: 4
Assignors
YANAI, HIDEHIRO
Executed: 2009-09-17
SAKATA, MASAKAZU
Executed: 2009-09-17
TAKAHASHI, AKIRA
Executed: 2009-09-17
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.