Patent Assignment
Reel/Frame 023363/0017
Assignment of Assignor's Interest
Recorded: 2009-10-13
Pages: 3
Assignor
HADIDI, KAMAL
Executed: 2009-10-12
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Technique for Monitoring and Controlling a Plasma Process with an Ion Mobility Spectrometer