Patent Assignment
Reel/Frame 023391/0839
Assignment of Assignor's Interest
Recorded: 2009-10-19
Pages: 5
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective of a Microlithographic Projection Exposure Apparatus
Application:
12/539,136 →
Publication:
US 2010/0026978
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.