Patent Assignment
Reel/Frame 023403/0307
Assignment of Assignor's Interest
Recorded: 2009-10-21
Pages: 4
Assignor
KINOSHITA, MICHIO
Executed: 2009-09-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus and Liquid Processing Method