Patent Assignment
Reel/Frame 023413/0595
Assignment of Assignor's Interest
Recorded: 2009-10-23
Pages: 3
Assignors
MAEDA, KENJI
Executed: 2009-08-07
YOKOGAWA, KENETSU
Executed: 2009-08-07
TAMURA, TOMOYUKI
Executed: 2009-09-10
HIROZANE, KAZUYUKI
Executed: 2009-09-14
ICHINO, TAKAMASA
Executed: 2009-09-10
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
1-24-14, NISHI SHINBASHI, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Application:
12/538,201 →
Publication:
US 2010/0326957
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.