Patent Assignment
Reel/Frame 023415/0630
Assignment of Assignor's Interest
Recorded: 2009-10-23
Pages: 2
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for the Spatially Resolved Measurement of Birefringence, and a Measuring Apparatus
Application:
12/604,670 →
Publication:
US 2010/0103420
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.