Patent Assignment
Reel/Frame 023416/0429
Assignment of Assignor's Interest
Recorded: 2009-10-23
Pages: 4
Assignors
KRAUS, DIETER
Executed: 2009-09-14
EHM, DIRK HEINRICH
Executed: 2009-09-07
STEIN, THOMAS
Executed: 2009-09-08
WOELFLE, HARALD
Executed: 2009-09-15
SCHMIDT, STEFAN-WOLFGANG
Executed: 2009-09-14
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Cleaning an Euv Lithography Device, Method for Measuring the Residual Gas Atmosphere and the Contamination and Euv Lithography Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.