Patent Assignment
Reel/Frame 023426/0937
Assignment of Assignor's Interest
Recorded: 2009-10-27
Pages: 2
Assignors
HIROSE, YOSHIRO
Executed: 2009-09-09
TAKASAWA, YUSHIN
Executed: 2009-09-10
KATO, TOMOHIDE
Executed: 2009-09-09
AKAE, NAONORI
Executed: 2009-09-09
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.