Patent Assignment
Reel/Frame 023458/0042
Assignment of Assignor's Interest
Recorded: 2009-11-02
Pages: 3
Assignor
HAYASHI, DAISUKE
Executed: 2009-10-21
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Movable Gas Introduction Structure and Substrate Processing Apparatus Having Same