Patent Assignment
Reel/Frame 023468/0348
Assignment of Assignor's Interest
Recorded: 2009-11-04
Pages: 4
Assignors
DODOC, AURELIAN
Executed: 2004-09-17
SCHUSTER, KARL-HEINZ
Executed: 2004-09-10
MALLMANN, JOERG
Executed: 2004-09-23
ULRICH, WILHELM
Executed: 2004-09-13
ROSTALSKI, HANS-JUERGEN
Executed: 2004-09-13
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Microlithographic Projection Exposure Apparatus
Application:
12/611,999 →
Publication:
US 2010/0045952
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.