Patent Assignment
Reel/Frame 023474/0912
Assignment of Assignor's Interest
Recorded: 2009-11-05
Pages: 8
Assignors
SCHUSTER, KARL-HEINZ
Executed: 2009-01-14
FELDMANN, HEIKO
Executed: 2009-01-21
GRUNER, TORALF
Executed: 2009-01-13
TOTZECK, MICHAEL
Executed: 2009-02-10
CLAUSS, WILFRIED
Executed: 2009-01-13
BEDER, SUSANNE
Executed: 2009-01-22
KRAEHMER, DANIEL
Executed: 2009-01-13
DITTMANN, OLAF
Executed: 2009-01-10
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Projection Objective of a Microlithographic Projection Exposure Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.