Patent Assignment
Reel/Frame 023475/0326
Assignment of Assignor's Interest
Recorded: 2009-10-27
Pages: 2
Assignor
YEOM, KYE-HEE
Executed: 2009-10-22
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Semiconductor Devices Including Buried Gate Electrodes and Isolation Layers and Methods of Forming Semiconductor Devices Including Buried Gate Electrodes and Isolation Layers Using Self Aligned Double Patterning