Patent Assignment
Reel/Frame 023500/0112
Assignment of Assignor's Interest
Recorded: 2009-11-11
Pages: 3
Assignors
VALCORE, JOHN C., JR.
Executed: 2009-08-31
ULLAL, SAURABH
Executed: 2009-08-31
BYUN, DANIEL
Executed: 2009-08-31
SANTOS, ED
Executed: 2009-09-01
MAKHRATCHEV, KONSTANTIN
Executed: 2009-09-03
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Methods and Arrangement for Plasma Dechuck Optimization Based on Coupling of Plasma Signaling to Substrate Position and Potential