Patent Assignment
Reel/Frame 023510/0495
Security Agreement
Recorded: 2009-11-13
Pages: 12
Assignor
METROSOL, INC.
Executed: 2009-11-09
Assignee
SILICON VALLEY BANK
3003 TASMAN DRIVE, SANTA CLARA, CALIFORNIA, 95054
Covered Properties
(30)
High Photon Energy Range Reflected Light Characterization of Solids
Patent:
6,414,302 →
Application:
09/160,017 →
Ultrathin Layer Measurement Having a Controlled Ambient of Light Path
Patent:
6,222,199 →
Application:
09/318,035 →
Angle of Incidence Accuracy in Ultrathin Dielectric Layer Ellipsometry Measurement
Patent:
6,323,947 →
Application:
09/461,658 →
Vacuum Ultraviolet Reflectometer System and Method
Vacuum Ultraviolet Referencing Reflectometer
Semiconductor Processing Techniques Utilizing Vacuum Ultraviolet Reflectometer
Broad Band Referencing Reflectometer
Method and Apparatus for Performing Highly Accurate Thin Film Measurements
Method and Apparatus for Accurate Calibration of Vuv Reflectometer
Vacuum Ultraviolet Reflectometer Integrated with Processing System
Method and Apparatus for Accurate Calibration of a Reflectometer by Using a Relative Reflectance Measurement
Method and Apparatus for Accurate Calibration of a Reflectometer by Using a Relative Reflectance Measurement
Vacuum ultra-violet reflectometer with stray light correction
Contamination Monitoring and Control Techniques for Use with an Optical Metrology Instrument
Patent:
7,342,235 →
Application:
11/600,413 →
Contamination Monitoring and Control Techniques for Use with an Optical Metrology Instrument
Contamination Monitoring and Control Techniques for Use with an Optical Metrology Instrument
Prism Spectrometer
Spectrometer with Collimated Input Light
Spectrometer with Moveable Detector Element
Method and Apparatus for Accurate Calibration of a Reflectometer by Using a Relative Reflectance Measurement
Broad Band Referencing Reflectometer
Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientations
Application:
11/998,263 →
Publication:
US 2008/0129986
Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths
Application:
12/072,878 →
Publication:
US 2009/0219537
Method and system for using reflectometry below deep ultra-violet (DUV) wavelengths for measuring properties of diffracting or scattering structures on substrate work-pieces
Application:
12/080,947 →
Publication:
US 2008/0246951
Broad band referencing reflectometer
Application:
12/231,350 →
Publication:
US 2009/0002711
Automated Calibration Methodology for Vuv Metrology System
Method and apparatus for providing multiple wavelength reflectance magnitude and phase for a sample
Application:
12/584,203 →
Publication:
US 2012/0170021
Vacuum Ultraviolet Reflectometer System and Method
Application:
90/009,164 →
Semiconductor Processing Techniques Utilizing Vacuum Ultraviolet Reflectometer
Application:
90/009,320 →
Vacuum Ultraviolet Reflectometer Integrated with Processing System
Application:
90/009,409 →
Related Assignments
(22)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 24, 1998
From: FREEOUF, JOHN L.
To: INTERFACE STUDIES, INC.
Reel/Frame 009483/0767 →
Assignment of Assignor's Interest
May 25, 1999
From: FREEOUF, JOHN L.
To: INTERFACE STUDIES INC.
Reel/Frame 009993/0610 →
Assignment of Assignor's Interest
Dec 1, 2000
From: FREEOUF, JOHN L.
To: INTERFACE STUDIES INC.
Reel/Frame 011345/0035 →
Assignment of Assignor's Interest
Dec 29, 2003
From: HARRISON, DALE A.
To: METROSOL, INC.
Reel/Frame 014846/0761 →
Assignment of Assignor's Interest
Dec 30, 2003
From: HARRISON, DALE A.
To: METROSOL, INC.
Reel/Frame 014854/0202 →
Assignment of Assignor's Interest
Dec 30, 2003
From: HARRISON, DALE A.
To: METROSOL, INC.
Reel/Frame 014847/0263 →
Assignment of Assignor's Interest
Jul 30, 2004
From: HARRISON, DALE A.
To: METROSOL, INC.
Reel/Frame 015700/0707 →
Assignment of Assignor's Interest
Aug 31, 2004
From: HARRISON, DALE A.
To: METROSOL, INC.
Reel/Frame 015757/0675 →
Assignment of Assignor's Interest
Aug 31, 2004
From: HARRISON, DALE A.
To: METROSOL, INC.
Reel/Frame 015758/0845 →
Assignment of Assignor's Interest
Jun 26, 2006
From: WALSH, PHILLIP; HARRISON, DALE A.
To: METROSOL, INC.
Reel/Frame 018013/0562 →
Assignment of Assignor's Interest
Aug 2, 2006
From: WALSH, PHILLIP; HARRISON, DALE A.
To: METROSOL, INC.
Reel/Frame 018105/0068 →
Assignment of Assignor's Interest
Nov 16, 2006
From: HARRISON, DALE A.; WELDON, MATTHEW
To: METROSOL, INC.
Reel/Frame 018613/0373 →
Assignment of Assignor's Interest
Nov 16, 2006
From: HARRISON, DALE A.; WELDON, MATTHEW
To: METROSOL, INC.
Reel/Frame 018593/0458 →
Assignment of Assignor's Interest
Nov 16, 2006
From: HARRISON, DALE A.; WELDON, MATTHEW
To: METROSOL, INC.
Reel/Frame 018582/0590 →
Assignment of Assignor's Interest
Jan 8, 2007
From: INTERFACE STUDIES, INC.
To: METROSOL, INC.
Reel/Frame 018720/0096 →
Assignment of Assignor's Interest
Apr 6, 2007
From: HARRISON, DALE A.; HAYES, ANTHONY T.
To: METROSOL, INC.
Reel/Frame 019157/0091 →
Assignment of Assignor's Interest
Apr 27, 2007
From: HARRISON, DALE A.; HAYES, ANTHONY T.
To: METROSOL, INC.
Reel/Frame 019247/0753 →
Release and Reassignment of Patents and Patent Applications
Mar 19, 2010
From: SILICON VALLEY BANK
To: METROSOL, INC.
Reel/Frame 024103/0794 →
Assignment of Assignor's Interest
Mar 21, 2010
From: METROSOL INC.
To: JORDAN VALLEY SEMICONDUCTORS LTD.
Reel/Frame 024103/0802 →
Assignment of Assignor's Interest
Mar 28, 2010
From: HARRISON, DALE A
To: METROSOL, INC
Reel/Frame 024140/0938 →
Security Interest
Apr 26, 2018
From: VUV ANALYTICS, INC.
To: SILICON VALLEY BANK
Reel/Frame 045648/0825 →
Change of Name
Apr 13, 2021
From: JORDAN VALLEY SEMICONDUCTORS LTD.
To: BRUKER TECHNOLOGIES LTD.
Reel/Frame 055994/0565 →