Patent Assignment
Reel/Frame 023516/0609
Assignment of Assignor's Interest
Recorded: 2009-11-13
Pages: 4
Assignors
KOBAYASHI, AKIKO
Executed: 2009-11-09
SHIMIZU, AKIRA
Executed: 2009-11-09
KOBAYASHI, NOBUYOSHI
Executed: 2009-11-09
LEE, WOO-JIN
Executed: 2009-11-09
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME NAGAYAMA, TAMA-SHI, TOKYO, 206-0025, JAPAN
Covered Property
(1)
Method of Forming Insulation Film by Modified PEALD