Assignment of Assignor's Interest

Recorded: 2009-11-20 Pages: 2

Assignor

FELDMANN, HEIKO

Executed: 2009-11-16

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Optical Arrangement for Three-Dimensionally Patterning a Material Layer

Application: 12/607,612 →

Publication: US 2010/0112465

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.