Assignment of Assignor's Interest

Recorded: 2009-11-23 Pages: 5

Assignors

BIEG, HERMANN

Executed: 2009-09-04

KWAN, YIM-BUN PATRICK

Executed: 2009-09-04

NGUYEN, UY-LIEM

Executed: 2009-11-09

Assignee

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Imaging Device with Exchangeable Diaphragms and Method Therefor

Application: 12/549,541 →

Publication: US 2010/0066990

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.