Patent Assignment
Reel/Frame 023564/0747
Assignment of Assignor's Interest
Recorded: 2009-11-24
Pages: 3
Assignee
SEMES CO. LTD.
#278 MOSI-RI, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, DEMOCRATIC PEOPLE'S REPUBLIC OF
Covered Property
(1)
Substrate Polishing Apparatus and Method of Polishing Substrate Using the Same