Patent Assignment
Reel/Frame 023587/0328
Assignment of Assignor's Interest
Recorded: 2009-12-01
Pages: 3
Assignors
TAKEMURA, KATSUYA
Executed: 2009-10-30
MASUNAGA, KEIICHI
Executed: 2009-10-30
DOMON, DAISUKE
Executed: 2009-10-30
SAGEHASHI, MASAYOSHI
Executed: 2009-10-30
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Positive Resist Composition and Pattering Process