Patent Assignment
Reel/Frame 023598/0761
Assignment of Assignor's Interest
Recorded: 2009-12-03
Pages: 4
Assignors
SUGISHITA, MASASHI
Executed: 2009-11-04
UENO, MASAAKI
Executed: 2009-11-04
IIDA, TSUKASA
Executed: 2009-11-06
NISHIURA, SUSUMU
Executed: 2009-11-04
AOYAMA, MASAO
Executed: 2009-11-09
FUJIMOTO, KENICHI
Executed: 2009-11-04
NAKAGAWA, YOSHIHIKO
Executed: 2009-11-04
MITSUI, HIROYUKI
Executed: 2009-11-04
Assignee
HITACHI KOKUSAI ELECTRIC, INC.
14-1 SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Semiconductor Device Manufacturing Method and Temperature Controlling Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.