Patent Assignment
Reel/Frame 023602/0968
Assignment of Assignor's Interest
Recorded: 2009-12-03
Pages: 4
Assignors
AKIYAMA, KOJI
Executed: 2009-11-20
HIGASHIJIMA, HIROKAZU
Executed: 2009-11-20
OZAKI, TETSUSHI
Executed: 2009-11-25
SHIBATA, TETSUYA
Executed: 2009-11-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Semiconductor Device and Method of Manufacturing the Same