Patent Assignment
Reel/Frame 023603/0680
Assignment of Assignor's Interest
Recorded: 2009-11-25
Pages: 3
Assignee
SEMES CO., LTD.
#278, MOSI-RI, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Chucking Member, Substrate Processing Apparatus Having the Member, and Method of Processing Substrate Using the Member