Patent Assignment
Reel/Frame 023611/0063
Assignment of Assignor's Interest
Recorded: 2009-11-24
Pages: 4
Assignor
KOSHITAKA, TOSHIAKI
Executed: 2009-11-02
Assignee
NEC ELECTRONICS CORPORATION
1753 SHIMONUMABE, NAKAHARA-KU, KAWASAKI-SHI, KANAGAWA, 211-8668, JAPAN
Covered Property
(1)
Method of manufacturing semiconductor device, Exposure device, and recording medium
Application:
12/591,597 →
Publication:
US 2010/0136799
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.