Patent Assignment
Reel/Frame 023612/0104
Assignment of Assignor's Interest
Recorded: 2009-11-24
Pages: 3
Assignors
TOKASHIKI, KEN
Executed: 2009-11-10
CHO, HONG
Executed: 2009-11-10
CHOE, JEONG-DONG
Executed: 2009-11-11
Assignee
SAMSUNG ELECTRONICS CO., LTD.
416, MAETAN-DONG, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Synchronous pulse plasma etching equipment and method of fabricating a semiconductor device